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Communication Dans Un Congrès Année : 2010

Resonant HEMT transducers and integrated MEMS resonators based on AlGaN/GaN/Si heterostructures

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hal-00808202 , version 1 (05-04-2013)

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  • HAL Id : hal-00808202 , version 1

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Marc Faucher, Bertrand Grimbert, Virginie Brandli, Yvon Cordier, Matthieu Werquin, et al.. Resonant HEMT transducers and integrated MEMS resonators based on AlGaN/GaN/Si heterostructures. Workshop on Compound Semiconductor Materials and Devices, WOCSEMMAD 2010, 2010, Newport Beach, CA, United States. ⟨hal-00808202⟩
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