MEMS advances and GaN based approaches - Archive ouverte HAL
Communication Dans Un Congrès Année : 2010

MEMS advances and GaN based approaches

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hal-00808201 , version 1 (05-04-2013)

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  • HAL Id : hal-00808201 , version 1

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Marc Faucher, Virginie Brandli, Bertrand Grimbert, Achraf Ben Amar, Matthieu Werquin, et al.. MEMS advances and GaN based approaches. 34th Workshop on Compound Semiconductor Devices and Integrated Circuits in Europe, WOCSDICE 2010, May 2010, Darmstadt, Germany. ⟨hal-00808201⟩
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