Conference Papers
Year : 2011
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https://hal.science/hal-00807645
Submitted on : Thursday, April 4, 2013-10:06:42 AM
Last modification on : Wednesday, January 24, 2024-9:54:18 AM
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- HAL Id : hal-00807645 , version 1
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Philippe Supiot, Céline Vivien, Karine Blary. Siloxane polymerization on micro-patterned substrates by RPECVD. 18th International Colloquium on Plasma Processes, CIP 2011, 2011, Nantes, France. ⟨hal-00807645⟩
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