In0.53Ga0.47As MOSFET with gate-first and gate-last process - Archive ouverte HAL
Conference Papers Year : 2012

In0.53Ga0.47As MOSFET with gate-first and gate-last process

J.J. Mo
  • Function : Author
Nicolas Wichmann
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Dates and versions

hal-00801048 , version 1 (15-03-2013)

Identifiers

  • HAL Id : hal-00801048 , version 1

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J.J. Mo, Nicolas Wichmann, S. Bollaert. In0.53Ga0.47As MOSFET with gate-first and gate-last process. 36th Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2012, 2012, Porquerolles, France. pp.1-2. ⟨hal-00801048⟩
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