Characterization of nano-crystalline diamond films grown by continuous DC bias during plasma enhanced chemical vapor deposition
V. Mortet
,
L. Zhang
,
M. Eckert
,
A. Soltani
,
J. d'Haen
,
O. Douheret
,
M. Moreau
,
S. Osswald
,
E. Neyts
,
David Troadec
(1)
,
P. Wagner
,
A. Bogaerts
,
G. van Tendeloo
,
K. Haenen
V. Mortet
- Function : Author
L. Zhang
- Function : Author
- PersonId : 179223
- IdHAL : lu-zhang
- ORCID : 0000-0002-8859-5453
- IdRef : 238287084
M. Eckert
- Function : Author
A. Soltani
- Function : Author
- PersonId : 178734
- IdHAL : ali-soltani
- ORCID : 0000-0001-6185-0760
- IdRef : 061426644
J. d'Haen
- Function : Author
O. Douheret
- Function : Author
M. Moreau
- Function : Author
S. Osswald
- Function : Author
E. Neyts
- Function : Author
David Troadec
- Function : Author
- PersonId : 745527
- IdHAL : david-troadec
- IdRef : 059727403
P. Wagner
- Function : Author
A. Bogaerts
- Function : Author
G. van Tendeloo
- Function : Author
K. Haenen
- Function : Author