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Communication Dans Un Congrès Année : 2010

Extended Lamb's model application to high-order resonances of micromachined circular membranes with integrated actuation and sensing capabilities

Liviu Nicu
Thomas Alava
  • Fonction : Auteur
Fabrice Mathieu
Denis Remiens
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hal-00800898 , version 1 (14-03-2013)

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Liviu Nicu, Thomas Alava, Fabrice Mathieu, Caroline Soyer, Denis Remiens. Extended Lamb's model application to high-order resonances of micromachined circular membranes with integrated actuation and sensing capabilities. IEEE Sensors Conference, 2010, Waikoloa, HI, United States. pp.245-248, ⟨10.1109/ICSENS.2010.5690478⟩. ⟨hal-00800898⟩
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