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Communication Dans Un Congrès Année : 2011

A LiNbO3 ultrasonic phased array transducer of more than 100 MHz

Résumé

High-frequency ultrasonic transducer arrays are essential for high resolution imaging in clinical analysis and Non-Destructive Evaluation (NDE). However, the structure design and fabrication of the kerfed ultrasonic array is quite challenging when very high frequency (≥ 100 MHz) is required. Inductively Coupled Plasma (ICP) deep etching process is used to etch 36°/Y-cut lithium niobate (LiNbO3) crystals. Furthermore, a finite element tool, COMSOL, is employed to calculate the electrical properties of the arrays, including crosstalk effect and electrical impedance. At last, arrays with a pitch of 40 μm are fabricated and characterized by a network analyzer. The measured results agree well with the theoretical predictions.
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Dates et versions

hal-00800446 , version 1 (13-03-2013)

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Wei-Jiang Xu, X.M. Ji, Jin-Ying Zhang, Julien Carlier, Bertrand Nongaillard, et al.. A LiNbO3 ultrasonic phased array transducer of more than 100 MHz. International Congress on Ultrasonics, ICU 2011, 2011, Gdansk, Poland. pp.675-678, ⟨10.1063/1.3703273⟩. ⟨hal-00800446⟩
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