Lead-zirconate titanate (PZT) nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical systems applications - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2011

Lead-zirconate titanate (PZT) nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical systems applications

S. Guillon
  • Fonction : Auteur
Daisuke Saya
L. Mazenq
Liviu Nicu
Caroline Soyer
J. Costecalde
  • Fonction : Auteur
Fichier non déposé

Dates et versions

hal-00800387 , version 1 (13-03-2013)

Identifiants

Citer

S. Guillon, Daisuke Saya, L. Mazenq, Liviu Nicu, Caroline Soyer, et al.. Lead-zirconate titanate (PZT) nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical systems applications. Joint 20th IEEE International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF-PFM-2011, 2011, Vancouver, Canada. pp.1-4, ⟨10.1109/ISAF.2011.6014113⟩. ⟨hal-00800387⟩
56 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More