Dispersion of confined acoustic phonons in ultra-thin Si membranes
Résumé
The acoustic phonon dispersion curves of ~10 and ~30 nm Si membranes were measured using Brillouin Light Scattering (BLS) spectroscopy. The dispersion relations of the confined phonons were calculated from a semi-analytical model based on continuum elasticity theory. Green’s function simulations were used to simulate both the phonon density of states and Brillouin spectra of the membranes. The effect of the native oxide layer was also considered, and found to affect significantly the dispersion of the higher order modes.
Domaines
Physique [physics]
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