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Article Dans Une Revue Review of Scientific Instruments Année : 2013

Ultrafast optical technique for measuring the electrical dependence of the elasticity of piezoelectric thin film : demonstration on AlN

Résumé

We present a technique based on ultrafast acoustics which permits us to measure the electrical dependence of the elastic properties of a thin piezoelectric layer. Ultrafast acoustics offers a unique way of measuring elastic properties of thin-layer in a non-destructive way using ultrashort optical pulses. We apply this technique to a thin layer to which a dc voltage is simultaneously applied. Both the film thickness and the sound velocity are affected. The two effects can be separated by use of a semi-transparent top electrode. A demonstration is made on a thin aluminum nitride (AlN). From that the d33 piezoelectric coefficient and the stiffness variation induced by the bias in AlN are measured.
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hal-00796410 , version 1 (02-06-2022)

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Arnaud Devos, P. Emery, E. Defay, N. Ben Hassine, G. Parat. Ultrafast optical technique for measuring the electrical dependence of the elasticity of piezoelectric thin film : demonstration on AlN. Review of Scientific Instruments, 2013, 84, pp.015007-1-4. ⟨10.1063/1.4788936⟩. ⟨hal-00796410⟩
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