Wire based and micromachined U_shaped cantilever devices for viscosity and mass density sensing for measurements in a frequency range of 100Hz to 100kHz - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2013

Wire based and micromachined U_shaped cantilever devices for viscosity and mass density sensing for measurements in a frequency range of 100Hz to 100kHz

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hal-00795358 , version 1 (27-02-2013)

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  • HAL Id : hal-00795358 , version 1

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Martin Heinisch, Erwin Reichel, T. Voglhuber-Brunnmaier, W. Hortschitz, M. Stifter, et al.. Wire based and micromachined U_shaped cantilever devices for viscosity and mass density sensing for measurements in a frequency range of 100Hz to 100kHz. 10th International Workshop on Nanomechanical Cantilever Sensors, 2013, Stanford, United States. 2 p. ⟨hal-00795358⟩
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