Integration of functional polymers in organic MEMS for sensing applications - Archive ouverte HAL
Communication Dans Un Congrès Année : 2013

Integration of functional polymers in organic MEMS for sensing applications

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Dates et versions

hal-00795354 , version 1 (27-02-2013)

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  • HAL Id : hal-00795354 , version 1

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Damien Thuau, Georges Dubourg, Karsten Haupt, Claude Pellet, Philippe Poulin, et al.. Integration of functional polymers in organic MEMS for sensing applications. 10th International Workshop on Nanomechanical Cantilever Sensors, 2013, Stanford, United States. 2 p. ⟨hal-00795354⟩
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