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Journal Articles Journal of Microelectromechanical Systems Year : 2012

Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers

Y. Cordier
M. Werquin
  • Function : Author
L. Buchaillot
Christophe Gaquière
D. Theron
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hal-00787408 , version 1 (12-02-2013)

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M. Faucher, Y. Cordier, M. Werquin, L. Buchaillot, Christophe Gaquière, et al.. Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers. Journal of Microelectromechanical Systems, 2012, 21, pp.370-378. ⟨10.1109/JMEMS.2011.2179010⟩. ⟨hal-00787408⟩
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