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Article Dans Une Revue IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control Année : 2012

Iridium interdigital transducers for high-temperature surface acoustic wave applications

Omar Elmazria
Badreddine Assouar

Résumé

Iridium is investigated as a potential metal for interdigital transducers (IDTs) in SAW devices operating at high temperatures. SAW delay lines based on such IDTs and langasite (LGS) substrate are fabricated and electrically characterized. The results show reliable frequency responses up to 1000°C. The strong increase of insertion losses beyond this temperature, leading to the vanishing of the signal between 1140 and 1200°C, is attributed to surface transformation of the LGS crystal, consisting of relevant gallium and oxygen losses, as evidenced by scanning electron microscopy, energy dispersive X-ray spectroscopy, and secondary ion mass spectroscopy.
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hal-00783991 , version 1 (24-02-2023)

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Thierry Aubert, Jochen Bardong, Omar Elmazria, Gudrun Bruckner, Badreddine Assouar. Iridium interdigital transducers for high-temperature surface acoustic wave applications. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2012, 59 (2), pp.194-197. ⟨10.1109/TUFFc.2012.2178⟩. ⟨hal-00783991⟩
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