Use of the longitudinal mode of screen-printed piezoelectric cantilevers coated with PEUT for toluene detection. Comparison with silicon cantilevers - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Sensors and Actuators B: Chemical Année : 2013

Use of the longitudinal mode of screen-printed piezoelectric cantilevers coated with PEUT for toluene detection. Comparison with silicon cantilevers

Résumé

Self-actuated and self-read-out piezoelectric cantilevers made of Au/PZT/Au (8x2x0.095mm3) beam layers on an alumina substrate are fabricated thanks to the association of screen-printing and sacrificial layer techniques. Then, PZT cantilevers used as piezoelectric resonant type sensors are functionalized with an organic PEUT layer (30μm) for toluene detection at room temperature. The first and second unusual in-plane 31-longitudinal modes presenting high resonant frequencies (respectively 70kHz and 214kHz) and good quality factors (200) are used for toluene detection. Sensitivities and LOD are compared for both modes. Due to their higher resonant frequency, PZT cantilevers using these longitudinal vibration modes have higher sensitivities (15.0mHz.ppm-1 at 70kHz) than those actuated with the classical flexural mode of silicon cantilever (0.9mHz.ppm-1 at 3kHz). These interesting results demonstrate the potentialities of printed piezoelectric cantilevers for gas detection. Their performances are compared with those of silicon cantilevers actuated with transverse classical flexural modes.
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Dates et versions

hal-00743143 , version 1 (13-11-2014)

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Hélène Debéda, Riadh Lakhmi, Claude Lucat, Isabelle Dufour. Use of the longitudinal mode of screen-printed piezoelectric cantilevers coated with PEUT for toluene detection. Comparison with silicon cantilevers. Sensors and Actuators B: Chemical, 2013, 187, pp.198-203. ⟨10.1016/j.snb.2012.10.081⟩. ⟨hal-00743143⟩
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