RF Capacitively coupled plasmas in N2-H2 mixtures - Archive ouverte HAL Access content directly
Conference Papers Year : 2012

RF Capacitively coupled plasmas in N2-H2 mixtures


This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amount of injected H2, at constant coupled power.
Fichier principal
Vignette du fichier
escampig2012_mahjoub.pdf (35.33 Ko) Télécharger le fichier
Origin : Files produced by the author(s)

Dates and versions

hal-00741822 , version 1 (15-10-2012)


  • HAL Id : hal-00741822 , version 1


Ahmed Mahjoub, A. Gouveia, Nathalie Carrasco, C. D. Pintassilgo, L. Marques, et al.. RF Capacitively coupled plasmas in N2-H2 mixtures. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00741822⟩
170 View
235 Download


Gmail Facebook Twitter LinkedIn More