On the infuence of CO on a dusty N<sub>2</sub>-CH<sub>4</sub> CCP RF discharge - Archive ouverte HAL Access content directly
Conference Papers Year : 2012

On the infuence of CO on a dusty N2-CH4 CCP RF discharge

Benjamin Fleury
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Nathalie Carrasco
Thomas Gautier
Ahmed Mahjoub
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Guy Cernogora
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In this work, we report the study of the effect of CO addition to a N2:CH4 RF CCP plasma. Results show that CO impacts some plasma properties such as the self-bias voltage and the methane consumption kinetics. CO introdution modifies slightly the chemical composition of the gaseous products but significantly increases the inclusion of O in dust produced in the discharge.
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hal-00741761 , version 1 (15-10-2012)


  • HAL Id : hal-00741761 , version 1


Benjamin Fleury, Nathalie Carrasco, Thomas Gautier, Ahmed Mahjoub, Guy Cernogora. On the infuence of CO on a dusty N2-CH4 CCP RF discharge. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00741761⟩
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