<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00719785</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-24T16:27:32+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">INDUSTRIAL IMPLEMENTATION OF A DYNAMIC SAMPLING ALGORITHM IN SEMICONDUCTOR MANUFACTURING: APPROACH AND CHALLENGES</title>
            <author role="aut">
              <persName>
                <forename type="first">Justin</forename>
                <surname>Nduhura Munga</surname>
              </persName>
              <email type="md5">78a0289035536c26c68848dd57ae4c8e</email>
              <email type="domain">emse.fr</email>
              <idno type="idhal" notation="numeric">904868</idno>
              <idno type="halauthorid" notation="string">569002-904868</idno>
              <affiliation ref="#struct-244685"/>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Stéphane</forename>
                <surname>Dauzère-Pérès</surname>
              </persName>
              <email type="md5">fd93560ab052eec782c27b8895dea66a</email>
              <email type="domain">emse.fr</email>
              <idno type="idhal" notation="string">stephane-dauzere-peres</idno>
              <idno type="idhal" notation="numeric">14449</idno>
              <idno type="halauthorid" notation="string">584-14449</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-3566-3248</idno>
              <idno type="IDREF">https://www.idref.fr/070373973</idno>
              <affiliation ref="#struct-244685"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Philippe</forename>
                <surname>Vialletelle</surname>
              </persName>
              <email type="md5">7248494d59a9a49e2a999ff93fd6fe2c</email>
              <email type="domain">st.com</email>
              <idno type="idhal" notation="numeric">914133</idno>
              <idno type="halauthorid" notation="string">442402-914133</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Claude</forename>
                <surname>Yugma</surname>
              </persName>
              <email type="md5">b5b90feed2e1969e5bfe18092aa6fc58</email>
              <email type="domain">emse.fr</email>
              <idno type="idhal" notation="numeric">868326</idno>
              <idno type="halauthorid" notation="string">196397-868326</idno>
              <affiliation ref="#struct-244685"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Justin</forename>
                <surname>Nduhura</surname>
              </persName>
              <email type="md5">78a0289035536c26c68848dd57ae4c8e</email>
              <email type="domain">emse.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2012-07-20 19:00:33</date>
              <date type="whenWritten">2012-12-09</date>
              <date type="whenModified">2026-01-19 16:46:18</date>
              <date type="whenReleased">2012-07-20 19:00:33</date>
              <date type="whenProduced">2012-12-09</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="163405">
                <persName>
                  <forename>Justin</forename>
                  <surname>Nduhura</surname>
                </persName>
                <email type="md5">78a0289035536c26c68848dd57ae4c8e</email>
                <email type="domain">emse.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00719785</idno>
            <idno type="halUri">https://hal.science/hal-00719785</idno>
            <idno type="halBibtex">nduhuramunga:hal-00719785</idno>
            <idno type="halRefHtml">&lt;i&gt;Modeling and Analysis of Semiconductor Manufacturing (MASM) Conference (included in Winter Simulation Conference)&lt;/i&gt;, Dec 2012, Berlin, Germany. 9 p</idno>
            <idno type="halRef">Modeling and Analysis of Semiconductor Manufacturing (MASM) Conference (included in Winter Simulation Conference), Dec 2012, Berlin, Germany. 9 p</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="EMSE" corresp="INSTITUT-MINES-TELECOM">Ecole Nationale Supérieure des Mines de Saint-Etienne</idno>
            <idno type="stamp" n="CMP-ENSMSE" corresp="EMSE">CMPGC - Centre Microélectronique de Provence – Site Georges Charpak</idno>
            <idno type="stamp" n="SFL-ENSMSE" corresp="EMSE">CMPGC / SFL : Sciences de la fabrication et logistique</idno>
            <idno type="stamp" n="INSTITUTS-TELECOM">composantes instituts telecom </idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">INDUSTRIAL IMPLEMENTATION OF A DYNAMIC SAMPLING ALGORITHM IN SEMICONDUCTOR MANUFACTURING: APPROACH AND CHALLENGES</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Justin</forename>
                    <surname>Nduhura Munga</surname>
                  </persName>
                  <email type="md5">78a0289035536c26c68848dd57ae4c8e</email>
                  <email type="domain">emse.fr</email>
                  <idno type="idhal" notation="numeric">904868</idno>
                  <idno type="halauthorid" notation="string">569002-904868</idno>
                  <affiliation ref="#struct-244685"/>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Stéphane</forename>
                    <surname>Dauzère-Pérès</surname>
                  </persName>
                  <email type="md5">fd93560ab052eec782c27b8895dea66a</email>
                  <email type="domain">emse.fr</email>
                  <idno type="idhal" notation="string">stephane-dauzere-peres</idno>
                  <idno type="idhal" notation="numeric">14449</idno>
                  <idno type="halauthorid" notation="string">584-14449</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-3566-3248</idno>
                  <idno type="IDREF">https://www.idref.fr/070373973</idno>
                  <affiliation ref="#struct-244685"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Philippe</forename>
                    <surname>Vialletelle</surname>
                  </persName>
                  <email type="md5">7248494d59a9a49e2a999ff93fd6fe2c</email>
                  <email type="domain">st.com</email>
                  <idno type="idhal" notation="numeric">914133</idno>
                  <idno type="halauthorid" notation="string">442402-914133</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Claude</forename>
                    <surname>Yugma</surname>
                  </persName>
                  <email type="md5">b5b90feed2e1969e5bfe18092aa6fc58</email>
                  <email type="domain">emse.fr</email>
                  <idno type="idhal" notation="numeric">868326</idno>
                  <idno type="halauthorid" notation="string">196397-868326</idno>
                  <affiliation ref="#struct-244685"/>
                </author>
              </analytic>
              <monogr>
                <title level="m">Modeling and Analysis of Semiconductor Manufacturing (MASM) Conference (included in Winter Simulation Conference)</title>
                <meeting>
                  <title>Modeling and Analysis of Semiconductor Manufacturing (MASM) Conference (included in Winter Simulation Conference)</title>
                  <date type="start">2012-12-09</date>
                  <date type="end">2012-12-12</date>
                  <settlement>Berlin</settlement>
                  <country key="DE">Germany</country>
                </meeting>
                <imprint>
                  <biblScope unit="pp">9 pages</biblScope>
                  <date type="datePub">2012-12-09</date>
                </imprint>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">Dynamic sampling</term>
                <term xml:lang="en">semiconductor manufacturing</term>
                <term xml:lang="en">defectivity</term>
                <term xml:lang="en">control</term>
              </keywords>
              <classCode scheme="halDomain" n="spi.gproc">Engineering Sciences [physics]/Chemical and Process Engineering</classCode>
              <classCode scheme="halDomain" n="spi.nano">Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics</classCode>
              <classCode scheme="halDomain" n="spi.tron">Engineering Sciences [physics]/Electronics</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>In a worldwide environment, sustaining high yield with a minimum number of quality controls is key for manufacturing plants to remain competitive. In high-mix semiconductor plants, where more than 200 products are concurrently run, the complexity of designing efficient control plans comes from the larger amount of data and number of production parameters to handle. Several sampling algorithms were pro-posed in the literature, but most of them are seen impracticable when coming to an industrial implemen-tation. In this paper, we present and discuss the industrial implementation of a dynamic sampling algo-rithm in a high-mix semiconductor plant. We describe how the sampling algorithm has been modified, and point out the set of questions that have been raised by the industrial program. Results indicate that more than 30% of control operations on lots could be avoided without increasing the material at risk in production.</p>
            </abstract>
            <particDesc>
              <org type="consortium">IMPROVE ENIAC</org>
            </particDesc>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-244685" status="VALID">
          <orgName>Département Sciences de la Fabrication et Logistique</orgName>
          <orgName type="acronym">SFL-ENSMSE</orgName>
          <desc>
            <address>
              <addrLine>880, route de Mimet 13541 Gardanne</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://cmp.mines-stetienne.fr/content/214-manufacturing-sciences-logistics-department-sfl</ref>
          </desc>
          <listRelation>
            <relation active="#struct-29212" type="direct"/>
            <relation active="#struct-302102" type="indirect"/>
            <relation active="#struct-300642" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-23639" status="VALID">
          <orgName>STMicroelectronics [Crolles]</orgName>
          <orgName type="acronym">ST-CROLLES</orgName>
          <desc>
            <address>
              <addrLine>850 rue Jean Monnet BP 16 38926 Crolles</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.st.com</ref>
          </desc>
        </org>
        <org type="regrouplaboratory" xml:id="struct-29212" status="VALID">
          <orgName>École des Mines de Saint-Étienne</orgName>
          <orgName type="acronym">Mines Saint-Étienne MSE</orgName>
          <desc>
            <address>
              <addrLine>158, Cours Fauriel - 42023 Saint Étienne cedex 2</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.mines-stetienne.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-302102" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-302102" status="VALID">
          <idno type="IdRef">192427156</idno>
          <idno type="ISNI">000000012202567X</idno>
          <idno type="ROR">https://ror.org/025vp2923</idno>
          <idno type="Wikidata">Q27962533</idno>
          <orgName>Institut Mines-Télécom [Paris]</orgName>
          <orgName type="acronym">IMT</orgName>
          <date type="start">2012-03-01</date>
          <desc>
            <address>
              <addrLine>19 Place Marguerite Perey, 91120 Palaiseau</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.imt.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300642" status="VALID">
          <orgName>CMP-GC</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>