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Communication Dans Un Congrès Année : 2012

Dust particle growth kinetics in a sputtering discharge using Ar or Kr

Résumé

A high density of dust particles is grown by sputtering a polymer layer in Ar or Kr plasmas produced in capacitively-coupled radio-frequency discharges. The growth kinetics is compared in these two gases and the characteristics of the instabilities (evolution, frequency, shape) induced by the presence of dust particles are analyzed.
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Dates et versions

hal-00711516 , version 1 (25-06-2012)

Identifiants

  • HAL Id : hal-00711516 , version 1

Citer

Hagop Tawidian, Maxime Mikikian, Thomas Lecas, Isabelle Géraud-Grenier, Véronique Massereau-Guilbaud. Dust particle growth kinetics in a sputtering discharge using Ar or Kr. XXI Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG), Jul 2012, Viana do Castelo, Portugal. pp.P.2.7.1. ⟨hal-00711516⟩
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