Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymer
Résumé
This paper describes a promising method to improve the performances of organic resonant
microcantilevers. This method is based on the tuning of the viscoelastic properties of the material by
controlling internally the temperature of the structure. Actuation of the SU-8 free-standing
microstructures has been integrated by means of electromagnetic forces while a static resistive thermal
effect, obtained by applying a DC current in a conducting path, has been used to control the
temperature of the structure. Investigation of the electromagnetic and thermal influence on the static
and dynamic behavior has shown that the thermal effect dominates the electromagnetic one in static
mode and inversely in dynamic mode. As a result, by applying a constant heating of the structure, the
viscoelastic properties of polymers have been tuned, and the quality factor of SU-8 microcantilevers
has been thereby enhanced by a factor 2 in air and 2.25 in liquid.
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