On the direct bonding of two silicon surfaces - Archive ouverte HAL Access content directly
Conference Papers Year :
No file

Dates and versions

hal-00694144 , version 1 (03-05-2012)

Identifiers

  • HAL Id : hal-00694144 , version 1

Cite

Natacha Cocheteau, Frédéric Lebon, Iulian Rosu, Sonia Ait Zaid, Hélène Combes, et al.. On the direct bonding of two silicon surfaces. Colloque Euromech 514 New Trends in Contact Mechanics, Mar 2012, Cargese, France. ⟨hal-00694144⟩
128 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More