@article{ziani:hal-00693204, TITLE = {{Dielectric oxynitride LaTiOxNy thin films deposited by reactive radio-frequency sputtering}}, AUTHOR = {Ziani, Ahmed and Le Paven-Thivet, Claire and Fasquelle, Didier and Le Gendre, Laurent and Benzerga, Ratiba and Tessier, Franck and Chevir{\'e}, Fran{\c c}ois and Carru, Jean-Claude and Sharaiha, Ala}, URL = {https://hal.science/hal-00693204}, JOURNAL = {{Thin Solid Films}}, PUBLISHER = {{Elsevier}}, VOLUME = {520}, NUMBER = {14}, PAGES = {4536-4540}, YEAR = {2012}, DOI = {10.1016/j.tsf.2011.10.192}, KEYWORDS = {permittivity ; epitaxy ; sputtering ; Perovskites ; nitrides ; thin films}, HAL_ID = {hal-00693204}, HAL_VERSION = {v1}, }