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Article Dans Une Revue IEEE Microwave and Wireless Components Letters Année : 2011

Ku Band High-Q Tunable Surface-Mounted Cavity Resonator using RF MEMS Varactors

Résumé

This paper presents a 14 GHz high-Q (quality factor) tunable resonator using microelectromechanical system (MEMS) varactors. A brass surface mountable cavity has been bonded on a fused silica wafer on which are processed three 1.1 mm long MEMS varactors. Their location has been optimized in order to obtain a wide frequency shift, when the cantilevers are actuated on the substrate. 15% tuning range from 11.9 GHz to 14.2 GHz has been obtained with a continuous shift from 11.9 GHz to 13.6 GHz. Measurements result in an average unloaded quality factor (Qu) of 480 over the operating frequency band.
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Dates et versions

hal-00682617 , version 1 (26-03-2012)

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Citer

Romain Stefanini, Jorge A. Martinez, Matthieu Chatras, Arnaud Pothier, Vicente Boria, et al.. Ku Band High-Q Tunable Surface-Mounted Cavity Resonator using RF MEMS Varactors. IEEE Microwave and Wireless Components Letters, 2011, 21 (5), pp.237-239. ⟨10.1109/LMWC.2011.2126565⟩. ⟨hal-00682617⟩

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