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Communication Dans Un Congrès Année : 2011

Comparison of classical and two-photon photoelectric laser stimulation capabilities for failure analysis

Résumé

This paper reviews important parameters for the two-photon absorption (TPA) laser stimulation technique and presents results concerning the characterization of the TPA effective spot size along lateral and axial directions. TPA scans are compared with classical photoelectric stimulation images to investigate TPA capabilities for failure analysis and design debug.
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Dates et versions

hal-00669828 , version 1 (14-02-2012)

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  • HAL Id : hal-00669828 , version 1

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Kai Shao, V. Pouget, Emeric Faraud, C. Larue, D. Lewis. Comparison of classical and two-photon photoelectric laser stimulation capabilities for failure analysis. 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Jul 2011, Incheon, South Korea. pp.1-4. ⟨hal-00669828⟩
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