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Poster De Conférence Année : 2010

Capacitively coupled radio-frequency discharges in nitrogen at low-pressure

Résumé

This paper uses simulations and measurements to study capacitively coupled rf discharges (13.56 MHz) in pure nitrogen, produced within a cylindrical parallel-plate reactor, at 0.2-2 mbar pressures and 20-30 W coupled powers. The reactor is similar to a GEC reference cell surrounded by a lateral grounded grid. Simulations use an hybrid code that couples a 2D (r,z) time-dependent fluid module, describing the dynamics of charged particles, and a 0D kinetic module, describing the production and destruction of nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define space-time dependent electron parameters for the fluid code and to work-out space-time average rates for the kinetic code. Model results are compared to measurements of the self-bias potential, the effective rf power (accounting for circuit losses), the average electron density (obtained by resonant-cavity measurements), and the intensities of radiative transitions with the nitrogen SPS and with atomic lines emitted by argon traces (obtained by OES diagnostics).
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Dates et versions

hal-00669251 , version 1 (12-02-2012)

Identifiants

  • HAL Id : hal-00669251 , version 1

Citer

L. L. Alves, L. Marques, C. D. Pintassilgo, Gaëtan Wattieaux, J. Berndt, et al.. Capacitively coupled radio-frequency discharges in nitrogen at low-pressure. 63rd Annual Gaseous Electronics Conference (GEC). Bulletin of the American Physical Society, 55(7), 2010, Oct 2010, Paris, France. ⟨hal-00669251⟩
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