Microfabrication And Thermal Behavior Of Miniature Cesium-Vapor Cells For Atomic Clock Operations - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2011

Microfabrication And Thermal Behavior Of Miniature Cesium-Vapor Cells For Atomic Clock Operations

Résumé

We report on the microfabrication and packaging of Cs-vapor cells filled with Ne or Ar for micro atomic clocks (MACs) based on the coherent population trapping (CPT). We present a two-step anodic bonding process to control the cell atmosphere for long-term operation of MACs. Furthermore, the results of thermal analysis of a cell embedded in the physical package are shown in order to discuss the optimal design of the package for the thermal management of the MAC.
Fichier principal
Vignette du fichier
Hasegawa2011.pdf (272.43 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-00660585 , version 1 (19-04-2021)

Licence

Paternité

Identifiants

Citer

M. Hasegawa, R.K. Chutani, C. Gorecki, R. Boudot, P. Dziuban, et al.. Microfabrication And Thermal Behavior Of Miniature Cesium-Vapor Cells For Atomic Clock Operations. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2011, Cancun, Mexico. pp.712-715, ⟨10.1109/MEMSYS.2011.5734524⟩. ⟨hal-00660585⟩
143 Consultations
121 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More