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Article Dans Une Revue Optics and Laser in Engineering Année : 2010

Morphological study of femtosecond laser nanostructured borosilicate glass using atomic force microscopy and scanning electron microscopy

Résumé

The morphology of nano-craters drilled in borosilicate glass by single-shot femtosecond laser ablation has been studied by atomic force microscopy and scanning electron microscopy. The influence of polarization, numerical aperture (NA=0.4 and 0.8) and fluence (3

Dates et versions

hal-00658330 , version 1 (10-01-2012)

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Benoît Delobelle, François Courvoisier, Patrick Delobelle. Morphological study of femtosecond laser nanostructured borosilicate glass using atomic force microscopy and scanning electron microscopy. Optics and Laser in Engineering, 2010, 48, pp.615-625. ⟨10.1016/j.optlaseng.2009.09.013⟩. ⟨hal-00658330⟩
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