Nanoscience with non-equilibrium plasmas at atmospheric pressure
Résumé
number: 81.16.-c Methods of nanofabrication and processing 52.77.-j Plasma applications Abstract This review devoted to nanoscience with atmospheric pressure plasmas shows how nanomaterials are synthesised locally using three main ways: localized PECVD, nanoparticles and templates. On the other hand, self-organization of nano-objects on surfaces is driven by electric fields, stress and high temperatures. We show that the specificities of plasmas at high pressure, as their small size, their self-organization or their filamentation have been little exploited in the synthesis of nanomaterials. Finally, perspectives in the field are given. 3
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