Characterization of Plasma-Induced Damages on low-k during Interconnection Integration by Scatterometric Porosimetry
R. Hurand
(1)
,
Maxime Darnon
(1)
,
T. Chevolleau
(1)
,
D. Fuard
(1)
,
F. Bailly
(2)
,
R. Bouyssou
(2)
,
T. David
(3)
,
O. Joubert
(1)
,
F. Leverd
(2)
Maxime Darnon
- Fonction : Auteur
- PersonId : 17906
- IdHAL : maxime-darnon
- ORCID : 0000-0002-6188-7157
- IdRef : 124051758