All-silica nanofluidic devices for DNA-analysis fabricated by imprint of sol-gel silica with silicon stamp - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Lab on a Chip Année : 2012

All-silica nanofluidic devices for DNA-analysis fabricated by imprint of sol-gel silica with silicon stamp

Morten Bo Mikkelsen
  • Fonction : Auteur
E. Sondergard
  • Fonction : Auteur
  • PersonId : 828920
Etienne Barthel
Rodolphe Marie
  • Fonction : Auteur
Anders Kristensen
  • Fonction : Auteur
  • PersonId : 914090

Résumé

We present a simple and cheap method for fabrication of silica nanofluidic devices for single-molecule studies. By imprinting sol-gel materials with a multi-level stamp comprising micro- and nanofeatures, channels of different depth are produced in a single process step. Calcination of the imprinted hybrid sol-gel material produces purely inorganic silica, which has very low autofluorescence and can be fusion bonded to a glass lid. Compared to top-down processing of fused silica or silicon substrates, imprint of sol-gel silica enables fabrication of high-quality nanofluidic devices without expensive high-vacuum lithography and etching techniques. The applicability of the fabricated device for single-molecule studies is demonstrated by measuring the extension of DNA molecules of different lengths confined in the nanochannels.
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Dates et versions

hal-00642053 , version 1 (17-11-2011)

Identifiants

Citer

Morten Bo Mikkelsen, Alban A. Letailleur, E. Sondergard, Etienne Barthel, Jeremie Teisseire, et al.. All-silica nanofluidic devices for DNA-analysis fabricated by imprint of sol-gel silica with silicon stamp. Lab on a Chip, 2012, 12 (2), pp.262-267. ⟨10.1039/c1lc20689c⟩. ⟨hal-00642053⟩
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