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Communication Dans Un Congrès Année : 2011

One-step grown suspended single walled carbon nanotubes (SWNTS) by plasma enhanced chemical vapor deposition

Fabien Vialla
Christophe Voisin

Résumé

Suspended single-walled carbon nanotubes were grown only on predefined place of three dimensional structures for future nanotechnology applications . We demonstrated the in situ one-step growth of SWNTs by an electron cyclotron resonance (ECR) CVD method at low temperature (650°C) and low ethylene pressure ( 2x10-3 mbar)[1]. Catalytic Fe or Fe2O3 nanoparticles were directly deposited on Si pillars using a reactive sputtering ECR plasma. SWNTs were originally grown from catalysts on top of the pillars and finished on another silicon pillar or TiN electrode (Fig. 1). Raman scattering in a confocal microscopy setup has been used to measure the RBMs of SWNTs (Fig.2) therefore allowing the diameter distribution identification. We found that very narrow tubes (d<0.8nm) represent a significant amount of the suspended nanotubes. The G and D bands were also observed leading information on respectively, the metallic or semi-conducting nature of the individual nanotubes and their excellent crystallographic quality. Photo-luminescence microscopy will be used to identify individual SWNTs and to determine their chiral indices and study the excitonic diffusion dynamics in this very specific as grown suspended geometry. References [1] M. Delaunay, A. Senillou and M.N. Semeria, U.S. Patent n° US 7,160,585 B2-Jan. 9,2007
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Dates et versions

hal-00641023 , version 1 (14-11-2011)

Identifiants

  • HAL Id : hal-00641023 , version 1

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Marc Delaunay, Fabien Vialla, Christophe Voisin, Jean-Michel Gérard. One-step grown suspended single walled carbon nanotubes (SWNTS) by plasma enhanced chemical vapor deposition. GDRI GNT Meeting 2011, Feb 2011, Dourdan, France. ⟨hal-00641023⟩
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