One port contour-mode ZnO piezoelectric MEMS resonator - Archive ouverte HAL Access content directly
Journal Articles Microelectronic Engineering Year : 2011

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hal-00639933 , version 1 (10-11-2011)

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Tadeusz Gryba, Julien Carlier, S.X. Wang, X.Z. Zhao, S. Guo, et al.. One port contour-mode ZnO piezoelectric MEMS resonator. Microelectronic Engineering, 2011, 88, pp.3003-3010. ⟨10.1016/j.mee.2011.04.062⟩. ⟨hal-00639933⟩
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