Journal Articles
Microelectronic Engineering
Year : 2011
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https://hal.science/hal-00639933
Submitted on : Thursday, November 10, 2011-11:29:11 AM
Last modification on : Wednesday, September 6, 2023-3:27:17 PM
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Tadeusz Gryba, Julien Carlier, S.X. Wang, X.Z. Zhao, S. Guo, et al.. One port contour-mode ZnO piezoelectric MEMS resonator. Microelectronic Engineering, 2011, 88, pp.3003-3010. ⟨10.1016/j.mee.2011.04.062⟩. ⟨hal-00639933⟩
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