Visible microlaser two-photon polymerization in a microfludic cell: A resist study - Archive ouverte HAL
Article Dans Une Revue Microelectronic Engineering Année : 2011

Visible microlaser two-photon polymerization in a microfludic cell: A resist study

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hal-00634119 , version 1 (20-10-2011)

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T. Honegger, T. Elmberg, K. Berton, D. Peyrade. Visible microlaser two-photon polymerization in a microfludic cell: A resist study. Microelectronic Engineering, 2011, 88 (8), pp.2725-2728. ⟨10.1016/j.mee.2010.12.094⟩. ⟨hal-00634119⟩
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