SOI built-in heat spreader with temperature and pressure integrated sensors for cooling optimization and in-situ monitoring - Archive ouverte HAL
Communication Dans Un Congrès Année : 2009

SOI built-in heat spreader with temperature and pressure integrated sensors for cooling optimization and in-situ monitoring

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https://hal.science/hal-00603884

Soumis le : lundi 27 juin 2011-15:36:14

Dernière modification le : mercredi 29 mai 2024-09:48:03

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hal-00603884 , version 1 (27-06-2011)

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  • HAL Id : hal-00603884 , version 1

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B. Bercu, L. Montes, P. Morfouli. SOI built-in heat spreader with temperature and pressure integrated sensors for cooling optimization and in-situ monitoring. 8th International Conference on Microtechnology and Thermal Problems in Electronics (MicroTherm'2009), Jul 2009, Lodz, Poland. ⟨hal-00603884⟩

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