Patterned L10-FePt for polarization of magnetic films
Résumé
In various micro and nanosystems applications comprising magnetic films, the polarizing field still needs to be integrated. We hereby present a solution for the self biasing of magnetic films using micropatterned permanent magnets. Micromagnetic simulations were used as a designing and optimization tool to create a biasing structure. The samples were fabricated with varying geometric parameters using classical silicon microfabrication techniques. Nanostructured TbCo/FeCo magnetostrictive thin films were sputtered over coercive FePt filled trenches etched in silicon. Magnetic and magneto-elastic characterizations confirmed the numerical simulations. In particular, nonlinear actuation of a self-biased magnetostrictive cantilever has been obtained at a zero external polarizing field.
Origine : Fichiers produits par l'(les) auteur(s)
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