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Article Dans Une Revue Microelectronic Engineering Année : 2011

Ultra-smooth LiNbO3 micro and nano structures for photonic applications

Résumé

We report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3) substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or on RIE, and is exploited here for the fabrication of rods with smooth etched surfaces. A series of tests have been performed with fluorine gases. Nanometric rods with 200, 400 or 600 nm diameters, with a periodicity of 400, 800 and 1200 nm respectively and etched angles close to 68 for the RIE process and 75 for the ICP-RIE process have been fabricated. The second process is based on ''optical grade dicing'' and is dedicated to the fabrication of deep-etched ridge waveguides. First optical characterization results are reported. They show optical propagation losses value close to 0.1 dB/cm.
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hal-00583832 , version 1 (04-05-2021)

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G. Ulliac, B. Guichardaz, J.-Y. Rauch, S. Queste, S. Benchabane, et al.. Ultra-smooth LiNbO3 micro and nano structures for photonic applications. Microelectronic Engineering, 2011, 88 (8), pp.2417-2419. ⟨10.1016/j.mee.2011.02.024⟩. ⟨hal-00583832⟩
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