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Communication Dans Un Congrès Année : 2011

4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

Résumé

We report here on high resonance frequency AFM probes based on MEMS bulk mode resonators. They consist on silicon ring resonators with capacitive transducers vibrating in the in-plane elliptic mode. Nano-tips placed at the maximum of vibration are fabricated in batch process. After electrical and optical characterizations, chips supporting the resonator and the prominent tip are extracted from the wafer. Next, the AFM nanoprobes are integrated in a commercially available AFM set-up with a modified probe holder. Experimental results of high resonance frequency AFM images are presented.
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Dates et versions

hal-00579045 , version 1 (23-03-2011)

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Citer

Benjamin Walter, M. Faucher, Estelle Mairiaux, Zhuang Xiong, L. Buchaillot, et al.. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩. ⟨hal-00579045⟩
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