<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-00578213</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-26T04:02:34+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators</title>
            <author role="aut">
              <persName>
                <forename type="first">T.</forename>
                <surname>Baron</surname>
              </persName>
              <idno type="halauthorid">139701-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Éric</forename>
                <surname>Lebrasseur</surname>
              </persName>
              <idno type="halauthorid">795534-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">J.-P.</forename>
                <surname>Romand</surname>
              </persName>
              <idno type="halauthorid">465916-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">S.</forename>
                <surname>Alzuaga</surname>
              </persName>
              <idno type="halauthorid">186691-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">S.</forename>
                <surname>Queste</surname>
              </persName>
              <idno type="halauthorid">209866-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">G.</forename>
                <surname>Martin</surname>
              </persName>
              <email type="md5">6cb618c0a39b7a4bda366effe7107848</email>
              <email type="domain">univ-tlse3.fr</email>
              <idno type="idhal" notation="string">giurfa-martin</idno>
              <idno type="idhal" notation="numeric">5014</idno>
              <idno type="halauthorid" notation="string">62113-5014</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-7173-769X</idno>
              <idno type="IDREF">https://www.idref.fr/098130129</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">D.</forename>
                <surname>Gachon</surname>
              </persName>
              <idno type="halauthorid">248404-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">T.</forename>
                <surname>Laroche</surname>
              </persName>
              <idno type="halauthorid">2187816-0</idno>
              <affiliation ref="#struct-866"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Sylvain</forename>
                <surname>Ballandras</surname>
              </persName>
              <email type="md5">b88ce62bee7a1798c232d0816da1fc8d</email>
              <email type="domain">femto-st.fr</email>
              <idno type="idhal" notation="numeric">939660</idno>
              <idno type="halauthorid" notation="string">144510-939660</idno>
              <affiliation ref="#struct-245010"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jacques</forename>
                <surname>Masson</surname>
              </persName>
              <idno type="halauthorid">801154-0</idno>
              <affiliation ref="#struct-245010"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Sarah</forename>
                <surname>Djaouti</surname>
              </persName>
              <email type="md5">62d28f37106db948a3387a9fa869600a</email>
              <email type="domain">univ-fcomte.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2021-04-12 12:41:01</date>
              <date type="whenModified">2026-05-13 03:23:25</date>
              <date type="whenReleased">2021-04-12 12:44:16</date>
              <date type="whenProduced">2010-06-01</date>
              <date type="whenEndEmbargoed">2021-04-09</date>
              <ref type="file" target="https://hal.science/hal-00578213v1/document">
                <date notBefore="2021-04-09"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://hal.science/hal-00578213v1/file/Baron2010.pdf" id="file-3194712-2804814">
                <date notBefore="2021-04-09"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="111939">
                <persName>
                  <forename>Sarah</forename>
                  <surname>Djaouti</surname>
                </persName>
                <email type="md5">62d28f37106db948a3387a9fa869600a</email>
                <email type="domain">univ-fcomte.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-00578213</idno>
            <idno type="halUri">https://hal.science/hal-00578213</idno>
            <idno type="halBibtex">baron:hal-00578213</idno>
            <idno type="halRefHtml">&lt;i&gt;2010 IEEE International Ultrasonics Symposium&lt;/i&gt;, Jun 2010, New Port Beach, United States. pp.652-655, &lt;a target="_blank" href="https://dx.doi.org/10.1109/ULTSYM.2010.5935869"&gt;&amp;#x27E8;10.1109/ULTSYM.2010.5935869&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">2010 IEEE International Ultrasonics Symposium, Jun 2010, New Port Beach, United States. pp.652-655, &amp;#x27E8;10.1109/ULTSYM.2010.5935869&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://creativecommons.org/licenses/by/4.0/">CC BY 4.0 - Attribution<ref corresp="#file-3194712-2804814"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="UNIV-BM">Université de Technologie de Belfort-Montbeliard</idno>
            <idno type="stamp" n="ENSMM">Ecole Nationale Supérieure de Mécanique et des Microtechniques</idno>
            <idno type="stamp" n="UNIV-BM-THESE">Université de Technologie de Belfort-Montbeliard</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators</title>
                <author role="aut">
                  <persName>
                    <forename type="first">T.</forename>
                    <surname>Baron</surname>
                  </persName>
                  <idno type="halauthorid">139701-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Éric</forename>
                    <surname>Lebrasseur</surname>
                  </persName>
                  <idno type="halauthorid">795534-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">J.-P.</forename>
                    <surname>Romand</surname>
                  </persName>
                  <idno type="halauthorid">465916-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">S.</forename>
                    <surname>Alzuaga</surname>
                  </persName>
                  <idno type="halauthorid">186691-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">S.</forename>
                    <surname>Queste</surname>
                  </persName>
                  <idno type="halauthorid">209866-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">G.</forename>
                    <surname>Martin</surname>
                  </persName>
                  <email type="md5">6cb618c0a39b7a4bda366effe7107848</email>
                  <email type="domain">univ-tlse3.fr</email>
                  <idno type="idhal" notation="string">giurfa-martin</idno>
                  <idno type="idhal" notation="numeric">5014</idno>
                  <idno type="halauthorid" notation="string">62113-5014</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-7173-769X</idno>
                  <idno type="IDREF">https://www.idref.fr/098130129</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">D.</forename>
                    <surname>Gachon</surname>
                  </persName>
                  <idno type="halauthorid">248404-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">T.</forename>
                    <surname>Laroche</surname>
                  </persName>
                  <idno type="halauthorid">2187816-0</idno>
                  <affiliation ref="#struct-866"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Sylvain</forename>
                    <surname>Ballandras</surname>
                  </persName>
                  <email type="md5">b88ce62bee7a1798c232d0816da1fc8d</email>
                  <email type="domain">femto-st.fr</email>
                  <idno type="idhal" notation="numeric">939660</idno>
                  <idno type="halauthorid" notation="string">144510-939660</idno>
                  <affiliation ref="#struct-245010"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jacques</forename>
                    <surname>Masson</surname>
                  </persName>
                  <idno type="halauthorid">801154-0</idno>
                  <affiliation ref="#struct-245010"/>
                </author>
              </analytic>
              <monogr>
                <title level="m">IEEE International Frequency Control Symposium</title>
                <meeting>
                  <title>2010 IEEE International Ultrasonics Symposium</title>
                  <date type="start">2010-06-01</date>
                  <date type="end">2010-06-04</date>
                  <settlement>New Port Beach</settlement>
                  <country key="US">United States</country>
                </meeting>
                <imprint>
                  <biblScope unit="pp">652-655</biblScope>
                  <date type="datePub">2010</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1109/ULTSYM.2010.5935869</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">BAW</term>
                <term xml:lang="en">Pressure Sensor</term>
                <term xml:lang="en">HBAR</term>
                <term xml:lang="en">Temperature compensation</term>
              </keywords>
              <classCode scheme="halDomain" n="spi.acou">Engineering Sciences [physics]/Acoustics [physics.class-ph]</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>In  this  work,  we  propose  a  compensated  temperature pressure sensor fabricated on compound LiNbO3/Quartz/Quartz  substrates  obtained  by  Au/Au  bonding   at   room   temperature   and   double   face   lapping/polishing  of  LiNbO3/Quartz  stack  and  a  final  gold  bonding  with  a  structured  Quartz  wafer.  This  paper  shows  the  possibility  to  obtain  device  which  is  intrinsically low sensitive to thermal effects, and even allowing  a  second  order  compensation  thanks  to  the  Quartz thermal stability Sensitivity of the final sensor to  bending  moments  then  is  tested  and  results  show  pressure sensitivity of such devices.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-866" status="VALID">
          <idno type="IdRef">152639071</idno>
          <idno type="RNSR">200412232H</idno>
          <idno type="ROR">https://ror.org/004fmxv66</idno>
          <orgName>Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)</orgName>
          <orgName type="acronym">FEMTO-ST</orgName>
          <date type="start">2004-01-01</date>
          <desc>
            <address>
              <addrLine>32 avenue de l'Observatoire 25044 BESANCON CEDEX</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.femto-st.fr</ref>
          </desc>
          <listRelation>
            <relation name="UMR 6174" active="#struct-300261" type="direct"/>
            <relation active="#struct-300360" type="direct"/>
            <relation name="UMR6174" active="#struct-441569" type="direct"/>
            <relation active="#struct-458810" type="direct"/>
            <relation active="#struct-426438" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-245010" status="VALID">
          <orgName>SENSeOR SAS</orgName>
          <orgName type="acronym">SENSeOR SAS</orgName>
          <desc>
            <address>
              <addrLine>18 rue Alain Savary - 25000 Besançon</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-458810" type="direct"/>
            <relation active="#struct-426438" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300261" status="VALID">
          <orgName>Université de Technologie de Belfort-Montbeliard</orgName>
          <orgName type="acronym">UTBM</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300360" status="VALID">
          <idno type="IdRef">201436736</idno>
          <idno type="ROR">https://ror.org/05813w841</idno>
          <orgName>Ecole Nationale Supérieure de Mécanique et des Microtechniques</orgName>
          <orgName type="acronym">ENSMM</orgName>
          <desc>
            <address>
              <addrLine>École Nationale Supérieure de Mécanique et des Microtechniques26, rue de l'épitapheCS 5181325030 BESANÇON CEDEX - FRANCE</addrLine>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-458810" status="VALID">
          <idno type="IdRef">026403188</idno>
          <idno type="ISNI">0000000121883779</idno>
          <idno type="ROR">https://ror.org/03pcc9z86</idno>
          <orgName>Université Marie et Louis Pasteur</orgName>
          <orgName type="acronym">UMLP</orgName>
          <desc>
            <address>
              <addrLine>1 rue Goudimel25030 Besançon cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.umlp.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-426438" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-426438" status="VALID">
          <idno type="IdRef">200716271</idno>
          <idno type="ISNI">0000 0004 4910 6615</idno>
          <idno type="ROR">https://ror.org/02dn7x778</idno>
          <orgName>Université Bourgogne Franche-Comté [COMUE]</orgName>
          <orgName type="acronym">UBFC</orgName>
          <date type="start">2015-04-01</date>
          <date type="end">2024-12-31</date>
          <desc>
            <address>
              <addrLine>32, avenue de l’observatoire25000 BESANCON</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ubfc.fr</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>