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Conference Papers Year : 2010

Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators

Abstract

In this paper, we present a new approach for the fabrication and use of thinned single crystal films for the development of radio-frequency temperature compensated devices. We particularly focus on High-overtone bulk acoustic resonators (HBAR) for oscillator stabilization, taking advantage of the very high quality factors achievable with such devices. We obtained a good agreement between simulation and experiments. This paper shows the possibility to obtain device which is intrinsically low sensitive to thermal effects, and even allowing a second order compensation thanks to the Quartz thermal stability.
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hal-00578213 , version 1 (12-04-2021)

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T. Baron, Éric Lebrasseur, J.-P. Romand, S. Alzuaga, S. Queste, et al.. Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators. 2010 IEEE International Ultrasonics Symposium, Jun 2010, New Port Beach, United States. pp.652-655, ⟨10.1109/ULTSYM.2010.5935869⟩. ⟨hal-00578213⟩
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