Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrate - Archive ouverte HAL Access content directly
Conference Papers Year : 2010

Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrate

A. Soltani
Abdelkrim Talbi
V. Mortet
  • Function : Author
A. Bassam
  • Function : Author
A. Oussous
  • Function : Author
E. Monroy
K. Haenen
  • Function : Author
Philippe Pernod
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Dates and versions

hal-00574426 , version 1 (08-03-2011)

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  • HAL Id : hal-00574426 , version 1

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A. Soltani, Abdelkrim Talbi, V. Mortet, A. Bassam, A. Oussous, et al.. Improvement of AlN SAW performance by introduction of TiN nucleation layer on silicon substrate. 15th International Hasselt Diamond Workshop, SBDD XV, 2010, Hasselt, Belgium. ⟨hal-00574426⟩
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