@inproceedings{lu:hal-00567669, TITLE = {{Propri{\'e}t{\'e}s di{\'e}lectriques basse et haute fr{\'e}quence de couches minces p{\'e}rovskites oxynitrures LaTiOxNy d{\'e}pos{\'e}es sur diff{\'e}rents substrats}}, AUTHOR = {Lu, Yu and Ziani, Ahmed and Fasquelle, Didier and Kassem, Hussein and Le Paven-Thivet, Claire and Le Gendre, Laurent and Benzerga, Ratiba and Tessier, Franck and Vigneras, Valerie and Carru, Jean-Claude and Sharaiha, Ala}, URL = {https://hal.science/hal-00567669}, BOOKTITLE = {{Journ{\'e}es Caract{\'e}risation Microondes Mat{\'e}riaux JCMM}}, ADDRESS = {Brest, France}, YEAR = {2010}, MONTH = Mar, HAL_ID = {hal-00567669}, HAL_VERSION = {v1}, }