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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2010

Sub-hundred nanosecond electrostatic actuated RF MEMS switched capacitors

Aurélie Verger
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Arnaud Pothier
Cyril Guines
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  • PersonId : 919493
Aurelian Crunteanu
Pierre Blondy
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Jérémie Dhennin
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Adrien Broué
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Résumé

This paper presents a new mechanical architecture for RF MEMS components that are able to achieve reconfiguration faster than conventional MEMS switches. For most MEMS switches, the electrical switching speed is generally limited to a few microseconds, inherently restricted by the delay required to mechanically move their mobile membrane up and down. By using a proper mechanical design and the structural material fabrication process, this paper will show miniature bridges that are able to exhibit mechanical resonance frequencies over 10 MHz range to be compared to the few tens of kHz for conventional RF MEMS switches. As a result, the switching speed of these miniature components is greatly improved and reaches 50 to 100 ns. Such performance has been achieved using composite micro-beams based on the multilayer material assembly of alumina/aluminum/alumina. To our knowledge, this is the fastest switching speed reported for RF MEMS components so far.

Dates et versions

hal-00567666 , version 1 (21-02-2011)

Identifiants

Citer

Aurélie Verger, Arnaud Pothier, Cyril Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Sub-hundred nanosecond electrostatic actuated RF MEMS switched capacitors. Journal of Micromechanics and Microengineering, 2010, 20 (6), pp.064011-1-064011-7. ⟨10.1088/0960-1317/20/6/064011⟩. ⟨hal-00567666⟩
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