Liquid crystal micro-cells: collective fabrication of individual micro-cells
Résumé
We developed a micro technology process which enables the fabrication of microscopic individual liquid crys-tal cells. With a dimension close to 500 μm, they are the smallest inde-pendent cells manufactured to this day and can be placed on several kinds of substrates. One of our goals is to use these micro-cells for the fabrication of tunable VCSEL chips.