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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2010

Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media

Thomas Alava
  • Fonction : Auteur
Fabrice Mathieu
L. Mazenq
Caroline Soyer
Liviu Nicu

Dates et versions

hal-00549532 , version 1 (22-12-2010)

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Thomas Alava, Fabrice Mathieu, L. Mazenq, Caroline Soyer, Denis Remiens, et al.. Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media. Journal of Micromechanics and Microengineering, 2010, 20, pp.075014-1-8. ⟨10.1088/0960-1317/20/7/075014⟩. ⟨hal-00549532⟩
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