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Article Dans Une Revue Journal of Micromechanics and Microengineering Année : 2010

Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement

X.Q. Bao
  • Fonction : Auteur
Thomas Dargent

Dates et versions

hal-00549518 , version 1 (22-12-2010)

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X.Q. Bao, Thomas Dargent, Eric Cattan. Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement. Journal of Micromechanics and Microengineering, 2010, 20, pp.025005-1-13. ⟨10.1088/0960-1317/20/2/025005⟩. ⟨hal-00549518⟩
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