Quasi-monolithic heat flux microsensor based on porous silicon boxes - Archive ouverte HAL Access content directly
Journal Articles Sensors and Actuators A: Physical Year : 2010

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hal-00549493 , version 1 (22-12-2010)

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K. Ziouche, P. Godts, Z. Bougrioua, C. Sion, T. Lasri, et al.. Quasi-monolithic heat flux microsensor based on porous silicon boxes. Sensors and Actuators A: Physical , 2010, 164, pp.35-40. ⟨10.1016/j.sna.2010.09.015⟩. ⟨hal-00549493⟩
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