Optical and microstructural properties versus indium content in InxGa1-xN films grown by metal organic chemical vapor deposition - Archive ouverte HAL Access content directly
Journal Articles Applied Physics Letters Year : 2010

Optical and microstructural properties versus indium content in InxGa1-xN films grown by metal organic chemical vapor deposition

Abstract

We present comparative investigations of single phase InxGa1−xN alloys for a varying In content (x=0.07 to 0.14) grown by metal organic chemical vapor deposition (MOCVD) technique. While the composition was determined using secondary ion mass spectroscopy, we have investigated the microstructures in InxGa1−xN/GaN films by using transmission electron microscopy and correlated these with the refractive index of the material. Based on ellipsometric analysis of the films, the dispersion of optical indices for InxGa1−xN films is determined by using Tauc–Lorentz dispersion equations.
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hal-00549024 , version 1 (30-05-2022)

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Anisha Gokarna, Aurélien Gauthier-Brun, Will Liu, Ydir Androussi, Eric Dumont, et al.. Optical and microstructural properties versus indium content in InxGa1-xN films grown by metal organic chemical vapor deposition. Applied Physics Letters, 2010, 96 (19), pp.191909. ⟨10.1063/1.3425761⟩. ⟨hal-00549024⟩
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