Laser micro-etching of ferroelectric layers for insertion loss reduction of tunable resonators - Archive ouverte HAL
Communication Dans Un Congrès Année : 2010

Laser micro-etching of ferroelectric layers for insertion loss reduction of tunable resonators

Gérard Tanné
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Dates et versions

hal-00540610 , version 1 (28-11-2010)

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  • HAL Id : hal-00540610 , version 1

Citer

Yonathan Corredores, Quentin Simon, Lingyan Zhang, Ratiba Benzerga, Xavier Castel, et al.. Laser micro-etching of ferroelectric layers for insertion loss reduction of tunable resonators. JNTE 10 "Journées Nationales sur les Technologies Emergentes en micro-nanofabication", Nov 2010, Ecole Polytechnique, PALAISEAU, France. pp.We-E8. ⟨hal-00540610⟩
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