Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators - Archive ouverte HAL
Communication Dans Un Congrès Année : 2010

Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators

Fichier non déposé

Dates et versions

hal-00534061 , version 1 (08-11-2010)

Identifiants

  • HAL Id : hal-00534061 , version 1

Citer

T. Baron, E. Lebrasseur, D. Hermelin, D. Gachon, S. Alzuaga, et al.. Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators. JNTE 2010, Nov 2010, Palaiseau, France. ⟨hal-00534061⟩
104 Consultations
0 Téléchargements

Partager

More