Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators
T. Baron
(1)
,
E. Lebrasseur
(1)
,
D. Hermelin
(1)
,
D. Gachon
(1)
,
S. Alzuaga
(1)
,
G. Martin
(1)
,
D. Rabus
(1)
,
B. Guichardaz
(1)
,
V. Pétrini
(1)
,
S. Queste
(1)
,
R. Salut
(1)
,
S. Ballandras
(1)