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Article Dans Une Revue IEEE Electron Device Letters Année : 2009

Fast Laser Scanning Imaging System for Surface Displacement Measurements

Résumé

We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic devices. The use of galvanometric mirrors coupled to the heterodyne probe makes it a sensitive and fast measurement system. We present results on a microelectronic device, and we compare the performances of this system with point and CCD interferometry imaging setups.
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Dates et versions

hal-00506112 , version 1 (27-07-2010)

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Stéphane Grauby, Amine Salhi, Jean-Michel Rampnoux, Wilfrid Claeys, Stefan Dilhaire. Fast Laser Scanning Imaging System for Surface Displacement Measurements. IEEE Electron Device Letters, 2009, 30 (3), pp.222-224. ⟨10.1109/LED.2008.2012177⟩. ⟨hal-00506112⟩

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